Orlikovskii, A. A.: search on Z-Library

The world's largest scientific articles store. 70,000,000+ articles for free.

Don't use scam websites

1

On the DLTS Analysis of Deep Trap Profiles in Semiconductors

M. N. Zolotukhin, A. A. Orlikovskii

Journal:

physica status solidi (a)

Year:

1993

Language:

english

File:

PDF, 420 KB

english, 1993

2

Implantation of low-energy boron ions into silicon from a low-temperature high-density Ar + BF3plasma

I. I. Amirov, S. A. Krivelevich, S. G. Simakin, O. V. Morozov, A. A. Orlikovskii

Journal:

Russian Microelectronics

Year:

2000

Language:

english

File:

PDF, 501 KB

english, 2000

3

In memory of Matvei I. Elinson (1918-2000)

Y. V. Gulyaev, K. A. Valiev, G. N. Mesyats, V. G. Mokerov, A. A. Orlikovskii, L. N. Patrikeev, G. N. Fursei, V. N. Shrednik, Y. I. Balkarei, V. G. Baru, L. L. Golik, V. N. Lutskii, P. I. Perov, V. A.

Journal:

Russian Microelectronics

Year:

2000

Language:

english

File:

PDF, 499 KB

english, 2000

4

A method and devices of electron microtomography in scanning electron microscopy

A. V. Gostev, S. A. Ditsman, F. A. Luk’yanov, N. A. Orlikovskii, E. I. Rau, R. A. Sennov

Journal:

Instruments and Experimental Techniques

Year:

2010

Language:

english

File:

PDF, 2.86 MB

english, 2010

5

Emission tomography of plasma in technological reactors of microelectronics

A. V. Fadeev, K. V. Rudenko, V. F. Lukichev, A. A. Orlikovskii

Journal:

Russian Microelectronics

Year:

2009

Language:

english

File:

PDF, 498 KB

english, 2009

6

Electrophysical characteristics of HfO2gate structures formed by electron-beam evaporation

A. G. Vasil’ev, R. A. Zakharov, A. A. Orlikovskii, A. E. Rogozhin, M. S. Sonin, I. A. Khorin

Journal:

Russian Microelectronics

Year:

2009

Language:

english

File:

PDF, 243 KB

english, 2009

7

Measurements of linear dimensions of silicon nanorelief elements with a near-rectangular profile by defocusing the electron probe of a scanning electron microscope

K. A. Valiev, V. P. Gavrilenko, E. N. Zhikharev, M. A. Danilova, V. A. Kal’nov, Yu. V. Larionov, V. B. Mityukhlyaev, A. A. Orlikovskii, A. V. Rakov, P. A. Todua, M. N. Filippov

Journal:

Russian Microelectronics

Year:

2010

Language:

english

File:

PDF, 668 KB

english, 2010

8

Academician Kamil’ Akhmetovich Valiev 55 years in science

A. A. Orlikovskii

Journal:

Russian Microelectronics

Year:

2011

Language:

english

File:

PDF, 299 KB

english, 2011

9

Nondestructive contactless electron-beam diagnostics of microelectronic device structures

A. F. Aleksandrov, S. A. Ditsman, F. A. Luk’yanov, N. A. Orlikovskii, E. I. Rau, R. A. Sennov

Journal:

Russian Microelectronics

Year:

2010

Language:

english

File:

PDF, 744 KB

english, 2010

10

Optimization of the tomographic algorithm of the reconstruction of plasma irregularities in process reactors of microelectronics

A. V. Fadeev, K. V. Rudenko, V. F. Lukichev, A. A. Orlikovskii

Journal:

Russian Microelectronics

Year:

2011

Language:

english

File:

PDF, 772 KB

english, 2011

11

In situDiagnostics of Plasma Processes in Microelectronics: The Current Status and Immediate Prospects. Part I.

A. A. Orlikovskii, K. V. Rudenko

Journal:

Russian Microelectronics

Year:

2001

Language:

english

File:

PDF, 192 KB

english, 2001

12

InsituDiagnostics of Plasma Processes in Microelectronics: The Current Status and Prospects. Part II

A. A. Orlikovskii, K. V. Rudenko, Ya. N. Sukhanov

Journal:

Russian Microelectronics

Year:

2001

Language:

english

File:

PDF, 249 KB

english, 2001

13

A Microwave High-Density Plasma Source for Submicron Silicon IC Technology

S. N. Averkin, K. A. Valiev, V. A. Naumov, A. V. Kalinin, A. D. Krivospitskii, A. A. Orlikovskii, A. A. Rylov

Journal:

Russian Microelectronics

Year:

2001

Language:

english

File:

PDF, 192 KB

english, 2001

14

Phase Formation during the Surface-Diffusion Growth of Ti–Co–Si–N and Ti–Co–N Thin Films on Si and SiO2

A. G. Vasiliev, R. A. Zakharov, V. V. Rodatis, A. V. Lobintsov, A. A. Orlikovskii, I. A. Horin

Journal:

Russian Microelectronics

Year:

2001

Language:

english

File:

PDF, 289 KB

english, 2001

15

In situDiagnostics of Plasma Processes in Microelectronics: The Current Status and Immediate Prospect, Part III

A. A. Orlikovskii, K. V. Rudenko

Journal:

Russian Microelectronics

Year:

2001

Language:

english

File:

PDF, 302 KB

english, 2001

16

In situDiagnostics of Plasma Processes in Microelectronics: The Current Status and Immediate Prospects, Part IV

A. A. Orlikovskii, K. V. Rudenko, Ya. N. Sukhanov

Journal:

Russian Microelectronics

Year:

2001

Language:

english

File:

PDF, 426 KB

english, 2001

17

Reconstructing the energy spectra of backscattered electrons with allowance for the spectrometer’s response function

Koshev, N. A., Orlikovskii, N. A., Rau, E. I., Yagola, A. G.

Journal:

Bulletin of the Russian Academy of Sciences: Physics

Year:

2012

Language:

english

File:

PDF, 380 KB

english, 2012

18

Updating of the toroidal electron spectrometer intended for a scanning electron microscope and its new applications in diagnostics of micro- and nanoelectronic structures

A. V. Gostev, N. A. Orlikovskii, E. I. Rau, A. A. Trubitsyn

Journal:

Technical Physics

Year:

2013

Language:

english

File:

PDF, 1.17 MB

english, 2013

19

Anisotropic trench etching of silicon with high aspect ratio and aperture of 30–50 nm in a two-stage plasma-chemical cyclic process

Averkin, S. N., Lukichev, V. F., Orlikovskii, A. A., Orlikovskii, N. A., Rylov, A. A., Tyurin, I. A.

Journal:

Russian Microelectronics

Year:

2015

Language:

english

File:

PDF, 2.80 MB

english, 2015

20

Determination of thickness of ultrathin surface films in nanostructures from the energy spectra of reflected electrons

Kupreenko, S. Yu., Orlikovskii, N. A., Rau, E. I., Tagachenkov, A. M., Tatarintsev, A. A.

Journal:

Technical Physics

Year:

2015

Language:

english

File:

PDF, 514 KB

english, 2015

21

Investigation of the Process of Plasma Through Etching of HkMG Stack of Nanotransistor with a 32-nm Critical Dimension

Myakonkikh, A. V., Kuvaev, K. Yu., Tatarintsev, A. A., Orlikovskii, N. A., Rudenko, K. V., Guschin, O. P., Gornev, E. S.

Journal:

Russian Microelectronics

Year:

2018

Language:

english

File:

PDF, 1.12 MB

english, 2018

To build up a library is to create a life. It’s never just a random collection of books.

— Carlos María Domínguez

Official channel

Z-Library Desktop Launcher

Z-Library Since 2009 support@z-lib.do

EnglishРусскийEspañolItalianoελληνικάاللغة العربيةBahasa IndonesiaBahasa Malaysiaहिन्दीDeutschFrançaisPortuguêsУкраїнськаPolski中文繁體中文日本語Tiếng ViệtAzərbaycan DiliՀայոց լեզուภาษาไทยTürk Diliქართველიবাংলাپښتوతెలుగుاردو한국어SrpskiБългарски